This Request for Proposals (the “RFP”) is an invitation by the University of Ottawa (the “University”) to prospective proponents to submit proposals for a Benchtop Scanning Electron Microscope (SEM) , funded by the Canada Foundation for Innovation and the Ontario Research Fund.
THE DELIVERABLES:
The propsed equipment is a Benchtop Scanning Electron Microscope (SEM) for advanced materials characterization. High resolution imaging equipment is necessary to allow precise surface and sub-surface analysis at the nanoscale. The primary goal is to enhance research capabilities in quantum materials science and nanotechnology, leading to understanding of interface status of multi-stacked thin film (less than 100 nm), which is well aligned with objectives of Center for Hybrid Interfaces and Intelligent Thin-films (HIIT) objectives. Typical SEM provides a capability of ultra-high resolution and analytical functionalities including elemental analysis by Energy Dispersive X-ray Spectroscopy (EDS). The smaller form-factor of benchtop SEM provides further advantages of faster analysis preparation time, comparable resolution to full-size SEM, and little requirement of on-site facility preparation, such as two-stage pumping system and cooling water.
SEM provides high-resolution imaging down to the nanometer scale with a flexible paltform that allows both secondary electron (SE) and backscattered electron (BSE) imaging. The system should be equipped with EDS to enable compositional analysis. The equipment will be used across various research topics including thin film transistors, photodetectors, quantum-dots, and metasurface devices, which facilitating cutting-edge research and development in HIIT project. Our expectation are to get clear and high-contrast images with superior depth of field and analytical capability.
Mandatory Technical Specifications Requirements:
1.0 - Performance of Benchtop Scanning Electron Microscope
1.1 - The resolution must be equal to or better than 20 nm.
1.2 - Displayed magnification on the software must be equal or larger than 100,000X.
1.3 - Sample stage must be larger than 30 mm x 30 mm
1.4 - Sample stage travel range must be equal to or larger than 30 mm x 30 mm
1.5 - EDS system and EDS software must be equipped with SEM. Third-party EDS system is acceptable.
1.6 - Acceleration voltage must be adjustable between 5 kV and 15 kV.
1.7 - Either secondary electron or backscattered electron detector must come with the instrument.
1.8 - The instrument must offer automatic focus.
1.9 - Aperture replacements must be available through the supplier.
1.10 - The maximum field of view must be equal to or larger than 500 x 500 um.
1.11 - EDS system must show accurate energy level with a standard sample. (e.g. C, Si, Au)
1.12 - The tool must, at a minimum, have one chamber viewing camera (either side-view of the chamber or top-view of the sample holder).
1.13 - Anti-vibration table compliant to system requirements must be included
2.0 - Software and Computers
2.1 - The tool must come with a computer and software.
2.2 - If joystick panel is required, the tool must include joystick panel.
2.3 - The hard-drives must be solid-state-drive and one operating SSD (no specific capacity) and one imaging-data saving SSD (1TB) must be installed in the computer.
2.4 - Installation files to restore the SEM functionalities in case of hard drive failure must be provided.
3.0 - Warranty, Installation and Training
3.1 - Must include 1-year standard manufacturer’s warranty and technical support (on-site, emails and phone calls).
3.2 - Must include on-site installation and training. Supplier must agree to video-recording of the training session(s) for the purpose of future users trainings.
4.0 - Other
4.1 - The tool must not require a chiller
